Canary 4 Poly-Si

 

• First (top) tube: Wet/dry oxide
• Second tube: Boron diffusion
• Third tube: LPCVD Silicon nitride
• Fourth (bottom) tube: LPCVD polysilicon
  • Gases: SiH₄, N₂, SiH₂Cl₂ , NH₃, H₂, O₂

 

 

Location

Files

SOP:

Canary Furnace Stack SOP in PDF Format LPCVD Polysilicon SOP in PDF Format

Equipment Status

√ Tool is Up

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