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Coral Desktop Application
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Test Measure Inspect
Device Electrical Characterization
Keithley CV System
Keithley 4200 SCS
Metrology
4-point Probe Microtech RF-1
Film Stress Tencor FLX-2320
Mitutoyo Dial Indicator Probe
(1 um resolution)
N and K 1500 Analyzer
Nanospec 3000
Film thickness monitor for oxide, nitride and polysilicon
Polyvar MET Microscope
Profilometer Tencor P-10
submicron film thickness/surface roughness measurements
Profilometer, Tencor P20
UTI Wirebond Pull Tester
Verigy V93000 SOC Test Platform
Microscopes
Keyence VHX-5000 Microscope
Nikon Optiphot 1
Nikon Optiphot 2
Nikon V12A
Olympus MX51
Diagnostic Tools
Leak Detector Alcatel ASM 180
Oscilloscope Tektronix TDS 2002 B
Pirani Gauge
RGA Spectra Vac-Check
UV Intensity Meter OAI 357
UV Intensity Meter OAI 306
FLIR handheld IR camera
Bell 5180 Gaussmeter
SEM
SEM, JEOL 5910