CTR Nitride

Status Up

Live Screenshot:

https://coral.nanofab.utah.edu/lab/snapshots/see/CTR%20Nitride

Process Information

 

Process Characterization

A statistically designed experiment has been performed and analyzed in JMP to provide addtional information for Low Stress Nitride.  Click HERE to access the analysis, which includes an interactive profiler where the values of the process variables can be changed showing the effect on the film characteristics.

 

 

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