Cambridge Fiji F200

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From the manufacturer's website: "Our Fiji series is a modular, high-vacuum ALD system that accommodates a wide range of deposition modes using a flexible architecture and multiple configurations of precursors and plasma gases. The result is a next-generation ALD system capable of performing thermal and plasma-enhanced deposition."

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S/N: 200005 

Software and drivers backup: https://uofu.app.box.com/folder/158091894722

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