From the manufacturer's website: "Our Fiji series is a modular, high-vacuum ALD system that accommodates a wide range of deposition modes using a flexible architecture and multiple configurations of precursors and plasma gases. The result is a next-generation ALD system capable of performing thermal and plasma-enhanced deposition."
Live Screenshot: Click Here
Or live screenshots for other tools: Click Here
S/N: 200005
Software and drivers backup: https://uofu.app.box.com/folder/158091894722