Cambridge Fiji F200

Equipment Status

ReportedType of IssueDefinitionDetails
2022-08-06 11:39:58ShutdownRetire CORALNo Message
2022-07-13 10:20:28ProblemFlaking and contaminationThe chamber has reached its maximum capacity for build up tolerance. Inserting/removing the platen is flaking debris off the chamber wall and possibly contaminating each run. Tool will need to be taken offline for several weeks for a cleaning. Use at your own risk.