Reported | Type of Issue | Definition | Details |
---|---|---|---|
2022-08-06 11:39:58 | Shutdown | Retire CORAL | No Message |
2022-07-13 10:20:28 | Problem | Flaking and contamination | The chamber has reached its maximum capacity for build up tolerance. Inserting/removing the platen is flaking debris off the chamber wall and possibly contaminating each run. Tool will need to be taken offline for several weeks for a cleaning. Use at your own risk. |