Heidelberg MicroPG 101

 

  • Accepts DXF/CIF/BMP file formats
  • 3 um minimum feature size (Smaller features possible)
  • 3" x 3", 4" x 4", 5" x 5" chromium masks and direct wafer write
  • Light field or dark field selectable in system control software

 

SOFTWARE:

  • L-Edit CAD Layout Software
  • AutoCAD software
  • Intellisuite and Cadence design and simulation software (CADE lab)
  • DXF/GDSII/CIF file software conversion tools

PROCESS STATUS:

A screencast of the PC attached to the MicroPG 101 is available by going to https://coral.nanofab.utah.edu/lab/snapshots/see/Heidelberg%20MicroPG%20101.

 

PROCEDURE:

MASK MAKING STEPS

Consult with Nanofab staff regarding microfabrication process flow and mask design.

Design mask using AutoCad or LEdit

Mask size depends on wafer size, typically:

  1. 2” and 3” diameter wafers: 4” mask
  1. 4” diameter wafers: 5” mask

Mask polarity depends on deposition and etch processing:

  1. Liftoff using positive photoresist – Dark field (Transparent where film should remain after liftoff)
  1. Etching using positive photoresist – Light field (Opaque where film should remain after etch)


GENERAL DESIGN RULES:
• Keep in mind that defined areas will be exposed.
• Do not use special characters (spaces, punctuation marks, umlauts ..) in the design name.
• The design coordinate origin must be the center of the design.
• If possible, create the whole design in only one layer. If several layers are used, they will be merged using an OR function.
• All polylines must be closed. Keep in mind that interiors of polyline structures will be filled out completely, covering any structures within.
• Do not cross polylines, or create doubled vertices (vertices with no distance between them). This will create data errors.
• Do not use single lines without width.
• Limits:

  • maximum design size: 100mm x 100mm
  • 1,000,000 vertices/polygon
  • maximum definition or reference depth: 16
  • maximum number of definitions or references: 100,000


DXF SPECIFIC DESIGN RULES:
• Use a 100% AutoCAD compatible editor.
• The design has to be created in metrical units.
• As far as possible, only use the structure types "polyline", "circle", and "text".
• Only one text font is provided. This will replace any other font used in the design creation. The only supported text attributes are "rotated", "mirrored", and "scaled".
• Try to use as few layers as possible. All layers will be merged via an OR operation.
• Do not use special characters in the layer names.
• Polylines with width must not change their width (tapered lines).
• When inserting blocks, the same scaling has to be used for x and y.
• External blocks are not supported.

BMP SPECIFIC DESIGN RULES:
• Maximum image file size is 4 GB.
• For grayscale exposures, use 8-bit format. The 256 gray values will be interpolated down to 100 gray values.
• Create the design in a 90° counter-clockwise rotated version, as the design will be rotated 90° clockwise during data processing.

CIF SPECIFIC DESIGN RULES:
• Use only one layer. If several layers exist in a design file, only the layer with the most references will be written.
• Maximum definition or reference depth is 50.
• The subroutine with the highest number definition will be taken as main routine.

 

 

Tool Owner

Steve Pritchett (spritchett@eng.utah.edu)

Location

Files

SOP:

Heidelberg uPG SOP

Spec Sheet:

muepg101.pdf

Equipment Status

√ Tool is Up

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