Acquired through University Vice-President support in conjunction with a major contribution from the Zygo Corporation, this instrument quantitatively measures surface topography of a sample using white light optical interference. This yields a non-contact and very rapid method to acquire 3-D surface data over the field-of-view for the objective lens used.
Common applications include surface roughness quantification, MEMS inspection, MEMS device characterization, etch inspection and thin film characterization.
Installed Objectives: 5 and20
Range of Possible Objectives: 1,2, 5, 10, 20, 50, 100
Maximum of weight of approximately 7 lbs.
Togographical Measurement Range
150 micron vertical range with Angstrom resolution (faster)
5 mm vertical range with nm resolution (slower)
Lateral Resolution: 0.88 μm for 20X objective
Field-of-View: 350x260 μm2 with the 20X objective
Automated sample stage
Automated field stiching (links arrays of multiple images)
Sample translation 6" total in X and Y
Tip/Tilt: 8 total axes in Tip and Tilt
Analysis applications for surface roughness, step height, dimensional analysis, etc
Offline version of software available to lab users. Contact staff for information about software.