Acquired through University Vice-President support in conjunction with a major contribution from the Zygo Corporation, this instrument quantitatively measures surface topography of a sample using white light optical interference. This yields a non-contact and very rapid method to acquire 3-D surface data over the field-of-view for the objective lens used.
Common applications include surface roughness quantification, MEMS inspection, MEMS device characterization, etch inspection and thin film characterization.
Instrument Capabilities
Objectives
Installed Objectives: 5 and20
Range of Possible Objectives: 1,2, 5, 10, 20, 50, 100
Maximum of weight of approximately 7 lbs.
Togographical Measurement Range
150 micron vertical range with Angstrom resolution (faster)
5 mm vertical range with nm resolution (slower)
Lateral Resolution: 0.88 μm for 20X objective
Field-of-View: 350x260 μm2 with the 20X objective
Sample Stage
Automated sample stage
Automated field stiching (links arrays of multiple images)
Sample translation 6" total in X and Y
Tip/Tilt: 8 total axes in Tip and Tilt
Software
MetroPro 8.1.5
Analysis applications for surface roughness, step height, dimensional analysis, etc
Offline version of software available to lab users. Contact staff for information about software.