Profilometer Tencor P-20H
The P-20 is a stylus profilometer, which uses a sharp stylus (2 m tip radius) to quantitatively measure surface topography. The stylus is held at a fixed position, and the sample is scanned on a precision translation stage to make measurements. This system is very commonly used for measuring the thickness of thin films (using a patterned step), wafer bow for film stress analysis, and for quantitative surface roughness across large areas. The system is capable of 3-D surface imaging.
S/N: 09940111
Instrument Capabilities
Measurement Range
- 2 µm stylus tip radius
- 60 stylus cone angle
- 325 µm vertical range
- Capacitive sensor element
- Precision motion stage
- Roughly nm scale vertical resolution
- The P-20 has a 8 inch stage movement
Acquired Data
- Quantitative surface topography
- RMS roughness
- Film thickness (across a step)
- Wafer bow
- Line scans (2-D)
- Area scans (3-D)
Last Updated: June 30, 2010