This system is a state-of-the-art multitechnique surface analysis tool. The system measures the chemical composition and bonding of a surface, and can also perform depth profiles which look at the composition below the surface to limited depths. The system has been acquired through generous funding from an NSF Chemistry Research Instrumentation grant (CHE-0443657) and matching funds from the University of Utah Office of the Vice-president for Research.
Instrument Capabilities
X-Ray Photoelectron Microscopy (XPS) and Imaging XPS
Monochromatic X-ray source Al and Ag
Achromatic X-ray source Al and Mg
Small spot analysis to 15 microns
Angle-resolved XPS
Auger Electron Spectroscopy (AES)
Field-emission electron source
100 nm spot size
Scanning electron microscopy (SEM)
Scanning Auger microscopy (SAM)
Ion Scattering Spectroscopy (ISS/LEIS)
Helium ion beam source
Bipolar Hemispherical analyzer
Probes the top monolayer
Depth Profiling
Argon ion beam
Electron and Ion Dispersion
Combined Hemispherical Analyzer and Spherical Mirror Analyzer
Microchannel plate electron multiplier
Delay-line detector array
Vacuum/Gas Analysis
MKS Quadrupole Mass Spectrometer
Located in the Sample Transfer Chamber (STC)
Sample Control and Requirements
Positioning in X, Y, and Z by Automated manipulator
Rotation on manipulator axis for Angle Resovled
Temperature control from 77 K (LN2) to 600 K (in situheating)
The zip file contains the executable together with default library (based on Scofield cross-sections), HTML help manual and configuration files (~25Mb)