XRF, Eagle III Microspot

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EDS-based X-ray fluorescence (XRF) provides sub 1% bulk compositional analysis of large samples. The scanning stage enables elemental mapping (referenced to an optical image), with 0.1mm resolution, using microfocus capillaries. Made possible by a generous donation from George and Linda Caine.

Instrument Capabilities 

Ambient Conditions

  • atmospheric pressure
  • 100mTorr


Excitation Source

  • Rh
  • 100 micron capillary



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