Slice-n-view: the ability to incrementally image then cut 10 nm slices into the face of a 5um X 5um area, then rebuilding the images into a tomographic volume.
Deposit Pt in pre-defined patterns, down to ~35 nm line widths
Mill patterns using the FIB as a precision scalpel
Create precision cross-sections for in-situ viewing
Selectively remove organic material by precision FIB cutting, using injected water vapor enhanced etching
UHR- SEM column: with sub nm resolution
Omniprobe tool, gives the ability to prepare samples for TEM analysis
Below are some images acquired from the instrument (compressed for web viewing):