Equipment

Lab: SMBB

• 4-point Probe Microtech RF-1
• Acid Neutralization
• Agnitron Imperium GaO
• Allwin AccuThermo AW 610 RTP
• AMS 8ft Fume Hood
• APT Polos
• Bell 5180 Gaussmeter
• Binder FD53-UL
• Blue-M
• Blue-M 1
• Blue-M 2
• Blue-M 3
• Blue-M 4
• Bold sn1974 Etch
• Bold sn1975 Etch
• Bold sn1976 Litho
• Bold sn 1982 Diff-cln
• Bold Vent Deck SS
• Bosch D1
• Cambridge Fiji F200
• CDA
• CEE 100
• CEE 200X 1800 Spinner
• CEE 200X 9260 Spinner
• CEE 200XD Develop Spinner
• CEE 200X PDMS Spinner
• CHA SEL600
• Computer Work Stations
• Coral
• CTR LTO
• CTR Nitride
• CTR Poly
• CTR TEOS
• Denton 635
• Denton Discovery 18
• Denton SJ20C
• Disco DAD3220
• Disco DAD641
• DI Water
• Door Access
• DPSS UV Laser Marker
• Edwards GRC 1
• Edwards GRC 2
• EMS 1000 1
• EMS 1000 2
• EMS 1000 3
• Enercon Dyne-A-Mite
• EV 420
• EVG 520 IS
• Exhaust
• Eye Wash stations
• Film Stress Tencor FLX-2320
• FLIR handheld IR camera
• Gold Target
• Hafnium Target
• Headway EC101
• Heidelberg DWL66+
• Heidelberg MicroPG 101
• Heidelberg MicroPG 101-2-0.9um
• Heidelberg MicroPG 101-2-2.5um
• House N2
• House Vacuum
• HVAC
• Keithley 4200 SCS
• Keithley 4200 Semiconductor Parameter Analyzer
• Keithley CV System
• Keyence VHX-5000 Microscope
• Keysight 404A Mixed Signal Oscilloscope
• Keysight E5061B Network Analyzer
• KOH
• LaserStar 1900
• Leak Detector Alcatel ASM 180
• Lighting
• March Plasmod Barrel RIE - O2
• MEI Wedge
• Memmert Glass 250
• Memmert N2 300
• Micromanipulator Probe Station
• Mitutoyo Dial Indicator Probe
• MST Hazardous Gas Monitoring
• N and K 1500 Analyzer
• NanoFrazor Explore
• Nanoscribe 3D Photonic Pro GT
• Nanospec 3000
• Nikon Optiphot 1
• Nikon Optiphot 2
• Nikon V12A
• Niobium Target
• NI PXIe-1071 Chassis with 4-SMU 4143 Board
• OAI 200 1
• OAI 200 2
• OAI 800
• Olympus MX51
• Omicure 1000 UV Light Pen
• Optec Micromaster KrF
• Oscilloscope Tektronix TDS 2002 B
• Oxford 100 ICP
• Oxford Plasmalab 80
• Oxford Plasmalab 80 PECVD
• Palladium Target
• PDMS Aligner-Bonder
• Pirani Gauge
• Plasmatherm Metal Etch
• Plasmatherm Si Ox Nit
• Platinum Target
• Polyvar MET Microscope
• PR8 1
• PR8 2
• PR8 3
• PR8 4
• Process Cooling
• Profilometer Tencor P-10
• Profilometer, Tencor P20
• Profilometer Tencor P-20H
• ProTemp Clean Ox
• ProTemp Doped Ox
• Pure Air Sys E-DOC1
• Pure Air Sys S-DOC1
• Pure Air Sys S-DOC2
• RGA Spectra Vac-Check
• SCS PDS 2010
• Seal Jumbo 160 Dry Mount Press
• Semitool ST-260
• Semitool ST-870 C1
• Semitool ST-870 D1
• Semitool ST-870 D2
• SEM, JEOL 5910
• Showers
• SSEC Robotic Spinner
• Strasbaugh 6EC
• STS ICP ASE
• Suss MA1006
• Technics PE II-A
• TMV Super
• Universal Laser PLS6.150D
• UTI Wirebond Pull Tester
• UV Intensity Meter OAI 306
• UV Intensity Meter OAI 357
• UV Tape Release UVM-102W
• Verigy V93000 SOC Test Platform
• VWR 1410 Vacuum oven
• Wafab sn 14821 General
• Wifi
• XACTIX X2 XeF2
• YES HMDS1
• YES LP-III
• Zirconium Target

Lab: SAL

• AFM, Bruker Dimension Icon
• Allied M-Prep3 1
• Allied M-Prep3 2
• Allied M-Prep3 3
• Allied Techcut4
• Allied TECHPREP 10-1000
• Centrifuge, Fisher Scientific 225A
• dbFIB, FEI Helios NanoLab 650
• Digital Sonifier, Branson 250
• Ellipsometer, Woollam Spectroscopic
• Magnetometer, Microsense EZ7
• Microscope, Polyvar MET
• Nano Indenter, Hysitron Ti Premier
• Olympus LEXT OLS5000
• Optical Comparator, Vertex 220
• Optical Microscope, Reichert Jung MeF3
• Potentiostat, Gamry 600 Reference
• Precision Etching Coating System, Gatan 682
• Precision Ion Polishing System, Gatan 691
• SAXS WAXS, Anton Paar SAXS 2.0
• SEM, FEI Quanta 600 FEG
• SEM, FEI Teneo
• SEM Mill, Fischione 1060
• STEM, JEOL 2800
• XPS, Kratos Axis Ultra DLD
• XRF, Eagle III Microspot
• Zetasizer