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Utah Nanofab
College of Engineering | The University of Utah
Utah Nanofab
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Utah Nanofab
:
Equipment
:
Wafer Bonding
:
EVG 520 IS
EVG 520 IS
Location
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SOP:
4 inch Anodic Bonding SOP in PDF Format
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√ Tool is Up
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The University of Utah
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© 2013 University of Utah
Utah Nanofab 36 S. Wasatch Drive, SMBB Rm 2500 Salt Lake City Utah 84112
Staff Phone: (801) 581-5676 Student Phone: (801) 585-5573 Fax: (801) 587-3077