Optical Profiler, Zygo NewView

Status Problem

Acquired through University Vice-President support in conjunction with a major contribution from the Zygo Corporation, this instrument quantitatively measures surface topography of a sample using white light optical interference. This yields a non-contact and very rapid method to acquire 3-D surface data over the field-of-view for the objective lens used.


Common applications include surface roughness quantification, MEMS inspection, MEMS device characterization, etch inspection and thin film characterization.


 

 

  

 

Instrument Capabilities

Objectives

  • Installed Objectives: 5 and20
  • Range of Possible Objectives: 1,2, 5, 10, 20, 50, 100
  • Maximum of weight of approximately 7 lbs.

Togographical Measurement Range

  • 150 micron vertical range with Angstrom resolution (faster)
  • 5 mm vertical range with nm resolution (slower)
  • Lateral Resolution: 0.88 μm for 20X objective
  • Field-of-View: 350x260 μm2 with the 20X objective

Sample Stage

  • Automated sample stage
  • Automated field stiching (links arrays of multiple images)
  • Sample translation 6" total in X and Y
  • Tip/Tilt: 8 total axes in Tip and Tilt

Software

  • MetroPro 8.1.5
  • Analysis applications for surface roughness, step height, dimensional analysis, etc
  • Offline version of software available to lab users. Contact staff for information about software.

 

Last Updated: July 7, 2014

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