OpenCoral Instructions

Enabling / Disabling Equipment

These instructions follow the simple use case scenario of enabling and disabling the Canary 4 LPCVD Polysilicon furnace.

  1. Download OpenCoral.
  2. Open the file that you downloaded. It should prompt you with a login screen.
  3. Login with your Coral account. This is the same as your CADE Windows account. Please contact us if you need your account information.
  4. To use a machine, you need to click on the machine name on the left, then select from the menu "Equipment Actions" -> "Enable"
  5. You will then be prompted to select your project, account and process. The process should be "default". The project and account should correspond to the project you are working on.
  6. You are then prompted for some run data that describes your current run.
  7. When you are finished with your run, click the disable menu item that was next to enable earlier. This will again prompt you with a screen for entering your run data.
  8. In the case of the Canary Furnaces, you must then click the button labelled "Click here to add or modify wafer data".
  9. This will give you a screen where you can enter thickness measurements for 3 wafers. The wafer ID on this screen should just be 1, 2 and 3.
  10. The numbered sites on the wafer are located according to this image:
  11. Once you have finished your measurements, the machine will be disabled.