LEO 440 Quick Inspection SEM

Equipment Status

ReportedType of IssueDefinitionDetails
2017-01-11 09:46:46ShutdownNo DefinitionNo Message
2016-08-18 12:42:07Problembeam not turning onWhen turning on the beam, error message "EHT set error" is occuring. Beam doesn't turn on. Conversations with service engineer concerning HV power supply and repair are continuing.