1) HMDS Vapor Prime oven: run standard 150 C process
2) CEE 200 1813 spinner: 2000 rpm, 60 sec
3) Hot plate bake 110 C 60 sec
4) Measure Suss aligner lamp intensity at 365 nm using OAI handheld UV intensity meter
5) Suss aligner hard contact mode, exposure time = 30 mW/cm^2/measured lamp intensity
6) Develop AZ 1:1 developer 30 sec, room temperature
7) DI rinse 2 min, Spin Rinse Dry
Shipley 1813 small feature process (down to 1.5 um lines at full height)
1) HMDS Vapor Prime oven: run standard 150 C process
2) CEE 200 1813 spinner: 2000 rpm, 60 sec
3) Hot plate bake 110 C 60 sec
4) Measure Suss aligner lamp intensity at 365 nm using OAI handheld UV intensity meter
5) Suss aligner hard contact mode, exposure time = 25 mW/cm^2/measured lamp intensity
6) Develop AZ 1:1 developer 45 sec, room temperature
7) DI rinse 2 min, Spin Rinse Dry
AZ 9260 thick resist for DRIE (~10 um thickness)
1) HMDS Vapor Prime oven: run standard 150 C process
2) CEE 200 9260 spinner: 1500 rpm, 60 sec
3) Hot plate bake 110 C 180 sec
4) Measure Suss aligner lamp intensity at 365 nm using OAI handheld UV intensity meter
5) Suss aligner hard contact mode, exposure time = 200 mW/cm^2/measured lamp intensity
6) Develop AZ 400K:H2O 1:3.25 developer 6 min, room temperature
7) DI rinse 2 min, Spin Rinse Dry
General Photolithography SOP: